Physics and Technology of Advanced
MOSFETs - Today and the Future


Location: Tempe Arizona
Program Length: 2 days
Program Fee: $995 (SME Members: $895)
Program Dates: Fall 2009

Program Sections:

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Course Description

This course, a condensed version of an advanced MOSFET graduate course taught by D.K. Schroder at Arizona State University, covers most of the important physics and technology issues of today's advanced MOSFETs and discusses considerations for future devices and technologies.

The objective of this course is to provide a good overview of today's and tomorrow's MOS devices. It covers topics often not discussed in device physics courses, such as quantum effects/poly-Si depletion, subthreshold behavior, drain-induced barrier lowering (DIBL), gate-induced drain leakage (GIDL), short-channel effects, high-K and low-K dielectric issues, Cu interconnects, gate oxide leakage current, silicon-on-insulator and silicon-germanium issues as well as new device structures.

Course Instructors

Dieter K. Schroder, Professor of Electrical Engineering at Arizona State University (ASU), has worked with semiconductor materials and devices since 1968 at Westinghouse R&D Labs and ASU. He is the author of the books Advanced MOS Devices and Semiconductor Material and Device Characterization as well as many papers on semiconductors. He is a Life Fellow of IEEE.

Learning and Knowledge Outcomes

Review of Basic MOSFET Theory

  • Threshold Voltage
  • Current - Voltage

Deep Submicron MOSFETs

  • Mobility
  • Velocity Saturation
  • Series Resistance
  • Quantum Effects
  • Poly-Si Gate Depletion
  • Channel Length Modulation
  • Subthreshold Effects/Problems
  • Scaling

Short Channel Effects

  • Charge Sharing
  • VT Roll Off
  • Drain Induced Barrier Lowering
  • Channel Doping
  • Latchup

Hot Carriers

  • MOSFET Degradation
  • Substrate Current
  • MOSFET Lifetime
  • LDD and Hot Carrier Suppression
  • Gate Induced Drain Leakage Current

Electrostatic Discharge

  • Discharge Models

Gate Dielectric Issues

  • Gate Oxide Thickness Measurement
  • Tunneling Current
  • Reliability
  • High-K Dielectrics

Interconnects

  • Low-K Dielectrics
  • Copper versus Aluminum
  • Electromigration

Silicon-on-Insulator

  • SOI versus Bulk
  • Partial/Full Depletion
  • Floating Body Effects

Silicon-Germanium

  • Band Gap Offsets
  • Strained Layers
  • Mobility

Novel Device Structures

  • Double Gate MOSFETs
  • FinFETs

Who Should Attend

This course is intended for semiconductor engineers (device engineers, circuit engineers, process engineers and product engineers) with a basic understanding of semiconductor devices but want a deeper understanding of advanced MOSFET concepts.

Registration, Refunds and Cancellations

The registration fees for Center for Professional Development and Distance Education courses held at Arizona State University include instruction, handouts, refreshment breaks and meals as noted in the schedules found in the course schedule (agenda). Hotel accommodations are not included.

Fees may be paid by check, money order or purchase order. Please make all remittances payable, in U.S. funds, to Arizona State University. Payments by VISA, MasterCard and American Express also are accepted. Seating at the course is limited. Fax or e-mail the enrollment form as soon as possible to assure your space, even though payment may come later. Do not rely on your buyer or business office to send the form. Putting the enrollment form in the U.S. mail is only necessary if you will be enclosing a check or purchase order form. A confirmation letter will be faxed or mailed to you shortly after receipt of your enrollment.

Should you register and then need to cancel, please note that there is a cancellation fee. The rate of the fee is determined by how far in advance of the program/module start date the written request for cancellation is received by the Center for Professional Development and Distance Education (please see below). Written requests for cancellation may be received via either mail or fax.

  • Four or more weeks prior - 10% of program fee
  • Three weeks prior - 50% of program fee
  • Within two weeks - 75% of program fee

Transfer to another program or module is subject to a $250 administrative fee if made within six weeks of the program/module start date. Registrants who do not attend and do not cancel are subject to the complete fee. Participant substitutes may be made by submitting in advance a written request. The Center reserves the right to change instructors or cancel or reschedule a program in the event of insufficient enrollment or unforeseen circumstances.

For more information contact:

Octavio Heredia
Associate Director, Extended Education
asu.cpd@asu.edu